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Fully automatic horizontal wet etching equipment
The EFEM wafer transfer module is used to realize fully automatic wafer process operation
Features
1.High capacity, high WPH
2.Excellent cavity environment
3.Efficient chemical recycling
system
4.Support a wide range of
chemicals
5.The etching uniformity is good
6.Excellent drying effect
Application
wafer manufacturing, etc
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139 6265 8938
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